This Lecture “Photonic Localization Techniques” is about techniques for die level analysis of functional anomalies based on optical interactions with the DUT, like photon emission, laser stimulation techniques and thermographic techniques that convert the temperature profile into an optical contrast.

Photon emission, the most important technique to localize active device performance and anomalies, is presented in theory and application. Starting with - The physics behind the phenomena for a classification of the effects, over - Specialities for application through chip backside, to - Low voltage application,ll the important issues will be covered.

Scanning laser based techniques build the second part of the lecture. For names like OBIC, LIVA, LADA, TLS, OBIRCH, TIVA, XIVA, SDL, RIL and SEI, the common grounds and the distinctions are made comprehensible with a set of modules and thier composition.

A short paragraph about thermographic techniques based on optical contrasts is also included.