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| Session 1: Advanced Techniques 1 | ||||
| Location: Meeting Room J1-J2 (San Jose McEnery Convention Center) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: The Advanced Techniques session covers topics related to new tools and techniques that have the potential to provide new information or capability to the failure analyst than was previously available. In this light, this year the advanced techniques session opens with advanced current imaging techniques using SQUID/GMR sensors and a newly developed scanning laser-SQUID microscope, followed by a dopant region imaging technique using coaxial photon-ion column, then introduces a 3-D EBIC technique using FIB and EB double beam system, and finally closes with a novel X-ray fluorescence imaging technique for high resolution elemental mapping. | ||||
| Editors: | Rajen Dias Intel Corporation, Chandler, AZ Dr. William K. Lo DCG Systems, Fremont, CA Dr. Antonio Orozco Neocera, Inc., Beltsville, MD Mr. Mike Twiford Agere, Allentown, PA Mr. David Vallett IBM Systems and Technology Group, Essex Jct., VT Dr. Zhiyong Wang Intel Corporation, Chandler, AZ | |||
| Session Chair: | Dr. Zhiyong Wang Intel Corporation, Chandler, AZ | |||
| 9:25 AM | SYMP051.2 | Diffractive Lenses for High Resolution Laser Based Failure Analysis | ||
| 9:50 AM | SYMP051.3 | Dopant Imaging on Front Surface of Silicon Devices with a Coaxial Photon-Ion Column | ||
| 10:15 AM | SYMP051.4 | Newly Developed Scanning Laser-SQUID Microscope | ||