C. M. Shen, Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Hsin-Chu, Taiwan; T. C. Chuang, J. F. Chang, J. H. Chou, Taiwan Semiconductor Manufacture Company, Ltd., Tainan, Taiwan

Summary: This paper is to present a novel methodology, which is accomplished by applying difference analysis to Nano-probing technique. And the deductive method was developed to focus on resolving invisible failure modes that could not be characterized by common parameter measuring of Nano-probing nor checking of junction behavior.