A. Shimase, A. Uchikado, Y. Matsumoto, S. Watarai, S. Kawanabe, T. Suzuki, T. Majima, Renesas Technology Corp., Kodaira-shi, Japan; K. Hotta, T. Hirotoshi, Hamamatsu Photonics K.K., Hamamatsu-shi, Japan

Summary: A newly developed failure analysis assisting system can pick out the nets passing through the reactions detected in hardware analysis equipments, such as an emission microscope or an OBIRCH analysis system, and it can collate these nets to the doubtful nets extracted by software diagnosis to select the most doubtful net. This paper introduces the functions of the system and shows some case studies in actual failure analyses.