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Wednesday, November 15, 2006

FA/LIT Instrument Adjustments for Successful Analysis of Packaged Semiconductor Devices

D. J. D. Sullivan, S. Hsiung, LSI Logic, Fremont, CA; J. Soopikian, LSI Logic Corporation, Fremont, CA

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Summary: The laser ablation tool, FA/LIT, parameters required for successful use are dependent on the sample materials and require trail and error testing to determine. As set of succesful tests are shown along witht he need for sample grounding in the instrument.