V. V. Makarov, Tiza Lab, LLC, Milpitas, CA; R. K. Jain, Credence Systems Corp., Sunnyvale, CA

Summary: We developed procedures to deposit narrow, low resistance Molybdenum conductors including electrical isolation when closely spaced. To isolate adjacent conductors, a procedure is applied enabling efficient removal of the over-spray and protecting dielectric between conductors in contrast to highly used XeF2