Z. Song, S. B. Ippolito, P. J. McGinnis, A. Shore, B. Paulucci, T. Kane, M. P. Tenney, F. G. Trudeau, A. W. Kozaczka, IBM, Hopewell Junction, NY

Summary: Vdd leakage issues can be addressed by global fault isolation with LCA, photoemission or laser stimulation techniques. However, the hot spot detected by these techniques may be a secondary effect. To pinpoint the exact defective location, further local fault isolation may be required by electrical probing. Once the defective location is identified, the appropriate follow-on physical failure analysis technique can be chosen for the root cause analysis. This paper will describe a thorough analysis process for Vdd leakage failure by a combination of various failure analysis techniques.