H. Ichikawa, K. Sasaki, K. Hamada, Sumitomo Electric Industries, LTD, Yokohama, Japan; A. Yamaguchi, Sumitomo Electric Industries, LTD, Itami, Japan

Summary: We employed in development of EL analysis that was used for failure analysis of edge-emitting LD. To extract EL emission from an LD, we developed tilt polish technique of bottom electrode. Then we successfully observed clear EL emission. Though severe control was required, high yield of 99.2 % was achieved by introduction of precise tilt polish technique.