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Thursday, November 6, 2008 - 10:55 AM
A study to remove heavy polymer remain on thick metal (> 3 micron) sidewall profile after metal etch solvent clean step
S. F. Liew, K. A. Mohammad, L. J. Liu, S. F. Chong, D. G. Lee, S. F. Lee, B. C. Lee, X-FAB SARAWAK SDN. BHD., Kuching, Malaysia
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Summary:
Removal of heavy polymer remain on thick metal sidewall profile.
