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Thursday, November 6, 2008 - 1:35 PM

Frontside and backside analysis of surface ESD

D. D. Daly, xilinx Ireland, Dublin, Ireland

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Summary: Analysis of mechanical scrathces on die surface ,which turn out to be a surface ESD event. Some new details are discovered by doing backside FA using IR on Phemos and FIB with no CAD naviagtion to help.