Z. Qian, C. Brillert, C. Burmer, Infineon Technologies AG, Munich, Germany

Summary: This abstract has introduced a new localization method called Mixed Frequency Thermal Laser Stimulation (MFTLS). At one side, this method will increase the dynamic TLS sensitivity by shifting the lockin detection frequency to a lower optimized value. On the other hand, this method can also be applied to the direct localization of the open site in metal line and cross talk. For open metal lines, the experiment results correlates well with the capacitor model for the gap in the open metal line. In order to obtain a better open detection, the frequency f2 must be raised to an optimized value. In the full paper, more details about this technique and MFTLS applications in FA will be showed in some case studies in the 90nm and 65nm techniques.