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Wednesday, November 5, 2008

Applications of in-situ sample preparation and modeling of SEM-STEM imaging

R. J. Young, B. Peterson, FEI Company, Hillsboro, OR; A. Buxbaum, FEI, Hillsboro, OR; R. Schampers, FEI Company, 5600 KA Eindhoven, Netherlands

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Summary: Using STEM mode in a DualBeam FIB-Sem system offers benefits for both sample preparation and for high resolution imaging. This paper covers modeling of STEM contrast in such as system and describes how this can be applied to improve image interpretation and sample preparation.