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Thursday, November 6, 2008 - 2:00 PM

3-D image reconstruction in the scanning electron microscope

W. E. Vanderlinde, Laboratory for Physical Sciences, College Park, MD

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Summary: In this paper, we demonstrate that commercial software running on a desktop computer can convert an SEM sterio-pair into a Digital Elevation Model (DEM) which is easy to view without any special equipment and can provide accurate measurements in all three dimensions.