R. Rosenkranz, Qimonda Dresden GmbH & Co. OHG, Dresden, Germany
The voltage contrast localization methods became widely accepted in the semiconductor failure analysis community during the last decade and nearly all labs make use of it. Nevertheless, there is a lack of a comprehensive overview over all phenomena related to this subject. I could imagine, that the ISTFA audience is interested in a tutorial about the multiple advantages, possibilities and limits of VC failure localization.