Z. Qian, Infineon Technologies AG, Munich, Germany

Summary: In this abstract, differential and lockin imaging methods of time integrated dynamic photon emission (DI- and LI-DPE) are introduced together with three typical case studies in design debug and failure analysis. DI-DPE showed unique advantage to enhance the expected weak or faint dynamic emission spots in the strong unexpected disturbed emission backgrounds. The LI- DPE method can be particularly applied into the situation with huge difference of dynamic photon emission intensity and separate different DPE spots from different power domains due to correlation property. In the whole paper, the imaging lockin method will be further discussed with periodic variation of frequency, temperature and patterns, particularly in high performance device. The phase imaging ability in LI-DPE will be investigated in detail. The phase information is believed to exclude the electroluminescence efficiency difference in the backside of dies