TEM offers superior spatial resolution and elemental analysis capabilities for identification and characterization of defects in semiconductor devices. This tutorial will focus on various TEM techniques used in microelectronics failure analysis. Following topics will be addressed: • Basic principles of TEM and Scanning TEM (STEM) • Sources of various contrast variations seen in TEM/STEM images and how to use them to identify defects in semiconductor devices • Principles and applications of Energy Dispersive Spectroscopy (EDS), Electron Energy Loss Spectrometry (EELS) and Energy-Filtered TEM (EFTEM) • Examples of applications of various TEM techniques in FA