section 1: Basics of Electrostatics (30min) section 2: Process-induced ESDFOS Failures on Devices: Failure Texture and Diagnosis (20min) section 3: How to Perform Proscess-Tool-related ESD risk assessments (25min)

Section 1: In opposite to standardized ESD audits, where manual procedures, workplaces, clothing, shoes etc. are reviewed, machine evaluation on ESD-risks needs an engineering approach. This needs a good knowledge on electrostatic fundamentals including charge separation by process media flow (e.g. water) and the functional principles of various, also historic electrostatic generators (which are frequently unintentiously designed-in into manufacturing robotics). Section 1 performs a fundamental introduction into electrostatics with several practical experiments and demos. Section 2: Since surface ESD impacts (ESDFOS) are frequently mixed up with mechanical damage, ESDFOS examples will be presented in both aluminum and copper technology. The goal of this section is to give guidelines to the failure analyst to perform a correct diagnosis in case of ESDFOS impacts and to show how to perform the failure analysis most effectively. Section 3: The know-how-combination of sections 1 and 2 leads us to section 3, the root causes. In this section, the methodology of such tool ESD risk assessments are presented. The main topics are: a) how to prepare the evaluation, b) what kind of equipment is needed, c) tool-related ESDFOS risk evaluation including improvements, d) reporting and rating. At the end, a brief statistical overview about relevant findings in such tool-related-ESD risk assesssments is shown, too.