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Monday, November 15, 2010 - 1:00 PM

Ultra-High Resolution in the SEM

W. E. Vanderlinde,  , Washington, DC

This tutorial covers the underlying theory behind SEM imaging and analysis, with applications to ultra-high resolution. Advanced topics include STEM-in-SEM, low-loss imaging, Helium ion microscopy, aberration corrected and energy filtered optics, sample contamination, and vibration correction.