The Role of Atomic Force Microscopy for failure analysis is discussed. The AFM is instrumental in defect and process failure analysis. The ability to measure dopant concentrations allows the identification of subtle yield variations especially in the area of suppressed yields due to "nonvisual" defects such as short channel effects or punchthrough. The many modes of the AFM are discussed from 3D high resolution imaging and lateral force to tunneling AFM. The role of the AFM and sample prep challenges to maximize the tool will be also be addressed. The tutorial is designed to relate practical examples of FA to the important role the AFM plays in determining root cause corrective action.