39th International Symposium for Testing and Failure Analysis (November 3 – 7, 2013)

November 03 - 07, 2013

Mr. Phil Kaszuba

Advisory Engineer
IBM Systems and Technology
967H
1000 River Street
Essex Junction, VT
USA 05452

Papers:
5.7 The Application of Magnetic Force Microscopy for Detection of Subsurface Anomalies in Semiconductor Device Wiring Levels