45th International Symposium for Testing and Failure Analysis (Nov. 10-14, 2019)
November 10 - 14, 2019
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Dr. Liangshan Chen
Principal Engineer
GLOBALFOUNDRIES Inc.
Malta, NY
USA 12020
Papers:
Application of Two-pin EBIC Technique to Isolate the Defective Fin(s) in Advanced Bulk FinFET Devices