Site-Specific Atom Probe Tomography on Semiconductor Devices

Wednesday, December 9, 2020: 1:30 PM
Mr. Roger L. Alvis , Thermo Fisher Scientific, Hillsboro, OR
Dr. Zdenek Kral , Thermo Fisher Scientific, Hillsboro, OR, Thermo Fisher Scientific, Hillsboro, OR
Dr. Jonathan Orsborn , Thermo Fisher Scientific, Hillsboro, OR
Mr. Trevan Landin , Thermo Fisher Scientific, Hillsboro, OR
Dr. Ty.J. Prosa , Cameca, Inc., Madison, WI
Dr. Katherine P. Rice , Cameca, Inc., Madison, WI

Summary:

We present an advanced sample preparation technique for Atom Probe Tomography (APT). With the proposed method we have been able to make a site-specific APT sample from semiconductor device (FinFET gate region) with the optimal geometry (tip shape) and minimal amorphization damage.
See more of: FIB Sample Preparation II
See more of: EDFAS Virtual Workshop