Transmission Electron Microscopy (TEM) Tutorial
Transmission Electron Microscopy (TEM) Tutorial
Monday, October 28, 2024: 11:20 AM
The Pointe (Hilton San Diego Bayfront)
Summary:
Transmission electron microscope (TEM) has sub-nanometer spatial resolution, can reveal crystalline defect, also can determine chemical composition, and measure the strain. Therefore, TEM is a critical tool for semiconductor technology development, and often the finial step for failure analysis confirmation.
Transmission electron microscope (TEM) has sub-nanometer spatial resolution, can reveal crystalline defect, also can determine chemical composition, and measure the strain. Therefore, TEM is a critical tool for semiconductor technology development, and often the finial step for failure analysis confirmation.