Correlative Microscopy: In-Situ AFM-in-SEM Introduction, Capabilities, Case Studies Semiconductor Materials and Batteries
Correlative Microscopy: In-Situ AFM-in-SEM Introduction, Capabilities, Case Studies Semiconductor Materials and Batteries
Monday, October 28, 2024: 9:00 AM
The Pointe (Hilton San Diego Bayfront)
Summary:
Explore the latest advancements in in-situ correlative techniques during this focused tutorial, where we will delve into the integration of Atomic Force Microscopy (AFM) with Scanning Electron Microscopy (SEM). This session will cover the practical applications of AFM-in-SEM workflows, offering detailed insights into site-specific analyses crucial for tackling complex semiconductor challenges such as 3D NAND structures and SiC MOSFETs. Through various case studies, we'll discuss how combining AFM with SEM/FIB enhances precision in failure analysis, enables comprehensive material characterization, and improves data correlation. This tutorial is designed for professionals looking to deepen their understanding of these advanced methodologies and apply them to their own work in semiconductor analysis. Join us to engage with the latest techniques and share in a detailed exploration of how these tools can streamline your failure analysis processes.
Explore the latest advancements in in-situ correlative techniques during this focused tutorial, where we will delve into the integration of Atomic Force Microscopy (AFM) with Scanning Electron Microscopy (SEM). This session will cover the practical applications of AFM-in-SEM workflows, offering detailed insights into site-specific analyses crucial for tackling complex semiconductor challenges such as 3D NAND structures and SiC MOSFETs. Through various case studies, we'll discuss how combining AFM with SEM/FIB enhances precision in failure analysis, enables comprehensive material characterization, and improves data correlation. This tutorial is designed for professionals looking to deepen their understanding of these advanced methodologies and apply them to their own work in semiconductor analysis. Join us to engage with the latest techniques and share in a detailed exploration of how these tools can streamline your failure analysis processes.