Dr. Shunsuke Asahina

Head of SEM application team
JEOL Ltd.
EP Application
Akishima, Tokyo Japan 196-8558

Papers:

High-Quality Passive Voltage Contrast Imaging Enabled by a Novel Integrated Low-Angle Ion Milling–SEM Delayering System
Enhanced Passive Voltage Contrast Imaging Using a Compound Lens Enabled by In-Lens Detector Optimization for Advanced Semiconductor Devices