Mr. Yasuyuki Okano

Leader
JEOL Ltd.
Akishima, Tokyo
Japan 1968558

Papers:

High-Quality Passive Voltage Contrast Imaging Enabled by a Novel Integrated Low-Angle Ion Milling–SEM Delayering System
Enhanced Passive Voltage Contrast Imaging Using a Compound Lens Enabled by In-Lens Detector Optimization for Advanced Semiconductor Devices