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| Advances in Coatings, Processing and Diagnostics for Semiconductor Equipment and Electronics Applications | ||||
| Location: Laughlin III (Flamingo Las Vegas Hotel) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: | ||||
| Session Chair: | Dr. Adil Ashary Praxair Electronics, Indianapolis, IN | |||
| 1:50 PM | Integration of Process Science and Materials Science for Functional Coating Applications | |||
| 2:30 PM | Structural, Mechanical and Erosion Properties of Plasma Sprayed Yttrium Oxide Coatings by Axial Injection of Fine Powder Slurries for Semiconductor and Flat-Panel-Display Applications | |||
| 2:50 PM | Synthesis and Microstructure Evolution of Nano-Titania Doped Silicon Coatings | |||
| 3:10 PM | Break | |||