International Thermal Spray Conference (ITSC) 2009 (May 4-7, 2009): Systematic Study of Yttrium Oxide (Y2O3) Coating on Anodized Aluminum Surfaces

Tuesday, May 5, 2009: 9:40 AM

Laughlin III (Flamingo Las Vegas Hotel)

Dr. Hong Shih , LAM Research, Fremont, CA

Shun Wu , LAM Research, Fremont, CA

Tuochuan Huang , LAM Research, Fremont, CA

Duane Outka , LAM Research, Fremont, CA

Linda Jiang , LAM Research, Fremont, CA

Yan Fang , LAM Research, Fremont, CA

John Daugherty , LAM Research, Fremont, CA

Sivakami Ramanathan , LAM Research, Fremont, CA

Siwen Li , LAM Research, Fremont, CA

Oana Leonte , LAM Research, Fremont, CA

Yijun Du , LAM Research, Fremont, CA

Catherine Zhou , LAM Research, Fremont, CA

Chris Chang , LAM Research, Fremont, CA

A systematic study of thermal spray Y₂O₃ coating has been carried out. The study has included the following techniques:

Coating thickness, coating surface roughness (Ra), coating color and color uniformity, coating breakdown voltage, coating admittance in mS, corrosion resistance of coating in HCl solution, corrosion resistance of coating in electrochemical impedance spectroscopy (EIS) measurements, coating interface model in EIS measurements, coating bonding test through bending test, coating bonding strength through pulling test, coating surface observation under microscope, and coating wet cleaning compatibility.

All the above studies have helped us to have a better understanding of Y₂O₃ thermal spray coatings and its application in semiconductor industry.

See more of: The Role of Coatings in the Semiconductor Equipment, Flat Panel Display and Electronics Industries
See more of: Electronic and Semiconductor Applications