Tuesday, May 5, 2009: 9:00 AM-10:30 AM
Laughlin III (Flamingo Las Vegas Hotel)
Session Chair:
Dr. Hougong Wang
9:40 AM
Systematic Study of Yttrium Oxide (Y2O3) Coating on Anodized Aluminum Surfaces
Dr. Hong Shih, LAM Research;
Shun Wu, LAM Research;
Tuochuan Huang, LAM Research;
Duane Outka, LAM Research;
Linda Jiang, LAM Research;
Yan Fang, LAM Research;
John Daugherty, LAM Research;
Sivakami Ramanathan, LAM Research;
Siwen Li, LAM Research;
Oana Leonte, LAM Research;
Yijun Du, LAM Research;
Catherine Zhou, LAM Research;
Chris Chang, LAM Research