International Thermal Spray Conference (ITSC) 2009 (May 4-7, 2009): The Role of Coatings in the Semiconductor Equipment, Flat Panel Display and Electronics Industries

The Role of Coatings in the Semiconductor Equipment, Flat Panel Display and Electronics Industries

Tuesday, May 5, 2009: 9:00 AM-10:30 AM
Laughlin III (Flamingo Las Vegas Hotel)
Session Chair:
Dr. Hougong Wang
9:20 AM
Thermal Spray Coatings for Semiconductor Tools
Dr. Mahmood naim, Praxair Inc.
9:40 AM
Systematic Study of Yttrium Oxide (Y2O3) Coating on Anodized Aluminum Surfaces
Dr. Hong Shih, LAM Research; Shun Wu, LAM Research; Tuochuan Huang, LAM Research; Duane Outka, LAM Research; Linda Jiang, LAM Research; Yan Fang, LAM Research; John Daugherty, LAM Research; Sivakami Ramanathan, LAM Research; Siwen Li, LAM Research; Oana Leonte, LAM Research; Yijun Du, LAM Research; Catherine Zhou, LAM Research; Chris Chang, LAM Research
10:00 AM