International Thermal Spray Conference (ITSC) 2009 (May 4-7, 2009): Advances in Coatings, Processing and Diagnostics for Semiconductor Equipment and Electronics Applications

Advances in Coatings, Processing and Diagnostics for Semiconductor Equipment and Electronics Applications

Tuesday, May 5, 2009: 1:50 PM-3:10 PM

Laughlin III (Flamingo Las Vegas Hotel)

Session Chair:

Dr. Adil Ashary

1:50 PM

Integration of Process Science and Materials Science for Functional Coating Applications
Prof. Sanjay Sampath, S.U.N.Y at Stony Brook

2:30 PM

Structural, Mechanical and Erosion Properties of Plasma Sprayed Yttrium Oxide Coatings by Axial Injection of Fine Powder Slurries for Semiconductor and Flat-Panel-Display Applications
Dr. Junya Kitamura, Fujimi Incorporated; Dr. Zhaolin Tang, Northwest Mettech Corp.; Mr. Chris Davidson, Northwest Mettech Corp.; Mr. Hiroyuki Ibe, Fujimi Incorporated; Ms. Fumi Yuasa, Fujimi Incorporated; Mr. Alan Burgess, Northwest Mettech Corp.

2:50 PM

Synthesis and Microstructure Evolution of Nano-Titania Doped Silicon Coatings
Mr. Nick A. Moroz, University of Michigan Dearborn; Pravansu Mohanty, University of Michigan Dearborn; Harishankar Umapathy, University of Michigan Dearborn

3:10 PM

Break

See more of: Electronic and Semiconductor Applications

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