The Characterization of Thermal Spray Coated Yttria and its Precision Wet Cleaning - Problems and Approaches

Abstract for the 2012 International Thermal Spray Conference and Exposition will be forthcoming.

 Thermal spray coatings are used in a broad range of applications, such as the semiconductor equipment, flat panel display and electronics industries. Thermal spray ceramic coatings are used for desired electrical resistivity, dielectric constant and dielectric strength, for chemical and corrosion-resistance to components, and many other purposes. In semiconductor equipment applications, metallic coatings are used for a range of applications including reducing particle generation in process chamber operations during thin film deposition. The coatings used for all these industries improve the performance and extend the service times of operations