Start | At-A-Glance | Browse by Day | Author Index

ESA1 Session I

Tuesday, May 22, 2012: 8:00 AM-10:00 AM
Room 337 AB (Hilton Americas Houston )
Session Chair:
Dr. Robert Gansert
8:00 AM
ESA1.1
The Characterization of Thermal Spray Coated Yttria and its Precision Wet Cleaning - Problems and Approaches
Dr. Hong Shih, Lam Research Corporation
8:40 AM
ESA1.2
Thermal Spray Coatings Considerations in the Semiconductor Equipment Design and Chamber Operation
Mr. Joe Sommers, Applied Materials
9:00 AM
ESA1.3
Microstructure and Dielectric Nature of Plasma Sprayed Ultra Purity Aluminum Oxide Coatings
Dr. Satish Dixit, Plasma Technology Inc.
9:20 AM
ESA1.4
Thermal Spray Equipment and Materials Considerations for Electronics and Semiconductor Equipment Coatings
Mr. Alex Thornton, HAI Inc.
9:40 AM
ESA1.5
APS and VPS (CAP) Zirconia and Yttria Coatings
Mr. Robert Willson, APS Materials, Inc.
See more of: Electronic and Semiconductor Applications
<< Previous Session | Next Session >>