APS and VPS (CAP) Zirconia and Yttria Coatings

Title:   APS and VPS (CAP) Zirconia and Yttria Coatings

APS Materials, Inc. is a world leader in the thermal spray industry.  In the past 15 years, APS has developed innovative coatings for the semiconductor industry that improve corrosion resistance, dielectric properties, and cleanliness in a variety of process environments.  Using both atmospheric and controlled atmosphere processes, coating properties are selected for the targeted application.  Discussion of specific thermal spray coatings will include zirconium and yttrium oxides, as well as other materials for more specialized applications.  New processes being developed at APS for use in severe applications will also be discussed in detail.