Room Temperature Solid-State Deposition of Alumina

The ability to integrate ceramics with other materials is limited by high ceramic processing temperatures(>800°C). Recently, researchers demonstrated a novel solid-state deposition process to fabricate ceramic films at room temperature. In this process, sub-micron ceramic particles accelerated under vacuum by pressurized gas impact on substrates and form dense films. This process enables coatings/device integration in which ceramics are deposited on metals/plastics/glass. The fundamental mechanisms for ceramic particle deformation and bonding were investigated. Preliminary in-situ nanoindentation results showed that sub-micron-sized single-crystal alumina particles plastically deformed, then became polycrystalline, and finally fractured. However, micron-sized single crystal alumina particles didn't extensively deform before fracturing. Particle deformation and bonding mechanisms will be discussed and used as a basis to deposit coatings.

Sandia National Laboratories is a multi-program laboratory managed and operated by Sandia Corporation,  a wholly owned subsidiary of Lockheed Martin Corporation, for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-AC04-94AL85000.