S. Shukla, C. Drake, H. J. Choe, S. Seal, University of Central Florida, Orlando, FL; L. Ludwig, Kennedy Space Center, Titusville, FL

Summary: Sol-gel derived nanocrystalline indium oxide-doped tin oxide thin film has been deposited on the microelectromechanical systems (MEMS) devices and utilized for room temperature hydrogen sensing application. The effect of air-pressure and ultraviolet (UV)-radiation exposure on the room temperature hydrogen sensing characteristics of the present micro-sensor device has been systematically investigated.