N. M. Assaf-Anid, N. Yohannan, Manhattan College, Riverdale, NY; G. Hougham, S. J. Chey, S. Cordes, M. Farinelli, IBM, Yorktown Heights, NY; S. Goma, J. Rosner, 2IBM, Yorktown Heights, NY

Summary: In this study, the adhesion strength of titanium to polydimethylsiloxane (PDMS) was evaluated qualitatively by tape-peel testing and quantitatively by the measurement of peel strength. Films with varying thicknesses of PDMS were applied to silicon substrates by the use of conventional spin coating techniques. Various plasma and ion beam treatment techniques were employed to modify the surface of the PDMS film before deposition of titanium.