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Monday, August 1, 2005 - 8:45 AM
SES .1

Pulsed Magnetron Sputtering of Powder Targets: a New Development Tool for Multi-Component Coatings

P. Kelly, Manchester Metropolitan University, Manchester, United Kingdom

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Summary: Pulsed magnetron sputtering of powder targets is a highly versatile technique for depositing high quality multi-component coatings. Examples described here include doped-zinc oxide and ITO TCO coatings, CIS solar absorber layers, superhard CrB coatings and copper aluminium oxide p-type semiconductors