Scaling TiNiCu Thin Film Shape Memory Alloy Manufacturing from Laboratory R&D to Industrial Pilot Production

Shape memory alloy (SMA) thin films enable compact, efficient actuation for advanced microsystems, yet commercialization has long been limited by the absence of a high-volume, low-cost physical vapor deposition (PVD) process. Khanjur R&D has addressed this challenge by developing a patent pending industrial-scale PVD platform capable of producing uniform, functional TiNiCu films at pilot scale. TiNiCu ingots were first fabricated into industrial sputter targets, and the remaining scrap ingot material was re-machined into laboratory-scale targets, allowing controlled co-sputtering experiments that identify compositions exhibiting favorable thermal and mechanical transformation behavior. These laboratory studies directly inform manufacturing recipes implemented on the industrial PVD system.

Films deposited by the industrial process demonstrated uniform thickness, composition, and transformation response across twelve wafers per batch. Differential scanning calorimetry (DSC) confirmed uniform transformation temperatures, validating the process scalability. Additional anticipated results will include X-ray diffraction (XRD), temperature-dependent resistivity measurements, and mechanical testing to determine crystallographic structure and functional performance of both freestanding and bimorph actuator configurations.

This approach establishes a sustainable pathway to transition SMA thin-film technology from laboratory research to manufacturable products. The process enables scalable, U.S.-based production of next-generation shape-morphing components, electronics, and micro-actuators, including applications such as micro-UAV actuators. Further context on the advantages and multifunctional applications of thin-film SMAs is provided in [1].

[1] Curtis, Sabrina. "SCALABLE MANUFACTURING OF THIN-FILM SHAPE MEMORY ALLOYS FOR ELECTRONICS, AEROSPACE SYSTEMS, AND ROBOTICS." Advanced Materials & Processes 183.7 (2025)

Keywords—shape memory alloy, TiNiCu, microactuator, sustainable materials processing