Circular HV Magnetron Sputtering Source for in-situ RE doping of ECR-PECVD Si-based thin films

Rare-Earth (RE) materials provide precise optical emission in the visible as well as near infra-red wavelength ranges. As such RE doped silicon based luminescent materials address the challenges of providing the monolithic integration of an efficient reliable electrically driven light source and have become an attractive solution in both solid-state lighting (SSL) as well silicon photonics due to their relatively low cost and capability to be integrated into silicon based electronic systems.

This talk will briefly discuss the Electron Cyclotron Resonance Plasma Enhanced Chemical Vapour Deposition (ECR-PECVD) system used in producing these films and then transition into the upgrades performed by attaching a Circular High Vacuum Magnetron sputtering source as a means of introducing RE species for in-situ doping. We will describe the effects of process parameters on luminescence and structural composition of the films.