60th Annual Society of Vacuum Coaters Technical Conference (SVC TechCon 2017): http://www.asminternational.org/web/svc-techcon-2017/home

60th Annual Society of Vacuum Coaters Technical Conference (SVC TechCon 2017)
April 29 - May 04, 2017

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Edward J. Anderson

3M
Corporate Research Laboratory
St. Paul, MN
USA 55144

Papers:

Recapture of ion-induced secondary electrons emitted from magnetron targets
Low Temperature Plasma-Assisted Atomic Layer Epitaxy of III-V Nitride Semiconductors

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General Information

April 29 - May 04, 2017


Providence, RI