60th Annual Society of Vacuum Coaters Technical Conference (SVC TechCon 2017)
April 29 - May 04, 2017
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Frank Papa
Gencoa USA
Medina, OH
USA 44256
Papers:
Dense coating structures in magnetron sputtering using magnetically guided anodes
Monitoring and control of vacuum processes using a remote plasma emission spectroscopy based sensor
Optix - A novel wide range process gas monitor