60th Annual Society of Vacuum Coaters Technical Conference (SVC TechCon 2017)
April 29 - May 04, 2017
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Jacek Wojcik
McMaster University
Engineering Physics
Hamilton, ON
Canada L8S4L7
Papers:
Circular HV Magnetron Sputtering Source for in-situ RE doping of ECR-PECVD Si-based thin films