60th Annual Society of Vacuum Coaters Technical Conference (SVC TechCon 2017)
April 29 - May 04, 2017
Menu
Home
Start
Browse
Browse by Day
At-A-Glance
Author Index
C.R. Eddy Jr.
U.S. Naval Research Laboratory
Washington, DC
USA 20375
Papers:
Low Temperature Plasma-Assisted Atomic Layer Epitaxy of III-V Nitride Semiconductors