Fundamental Aspects of Coatings (joint session with ICMCTF)

Wednesday, May 3, 2017: 1:00 PM-3:40 PM
Ballroom A (Rhode Island Convention Center)
Holger Gerdes, Fraunhofer IST and Jianliang Lin, Southwest Research Institute
1:00 PM
1:40 PM
Linking Target Microstructure with its Sputter Performance
Christian Linke, Plansee SE; Jörg Winkler, Plansee SE; Harald Köstenbauer, Plansee SE; Dominik Lorenz, Plansee SE; Michael Eidenberger-Schober, Plansee SE
2:00 PM
Residual stress in thin films: effect of processing conditions and microstructure
Eric Chason, Brown University; Alison M Engwall, Brown University; Zhaoxia Rao, Brown University
2:20 PM
3:00 PM
Building a sputtering tool with off the shelf components
James W Moore, VP Engineering, MDC Vacuum LLC