C. Boit, U. Kerst, P. Sadewater, TUB Berlin University of Technology, Berlin, Germany; R. Leihkauf, Hahn Meitner Institut, Berlin, Germany; S. Schömann, Infineon Technologies AG, Munich, Germany; E. Le Roy, Credence Systems Corp., Sunnyvale, CA; T. Lundquist, DCG Systems, Fremont, CA