O. Millet, Delfmems / IEMN, Villeneuve d ascq, France; P. Bertrand, University of Technology Belfort - Montbeliard, Belfort Cedex, France; B. Legrand, L. Buchaillot, Silicon Microsystems Group / IEMN, Villeneuve d ascq, France; D. Collard, CIRMM / IIS-CNRS, Institut of Industrial Science, University of Tokyo, Villeneuve d ascq, France