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Thursday, November 18, 2004 - 3:55 PM
27.3

Observations of Crystal Damage on Sidewalls of TEM Samples Prepared by FIB Milling

Q. Gao, Semiconductor Manufacturing International Corporation, Shanghai, China; M. Zhang, Semiconductor Manufacturing International Corperation, Shanghai, China; C. Niou, Semiconductor Manufacturing International (Beijing) Corp, Beijing, China; M. Li, Semicoductor Manufacturing International Co., Shanghai, China; W. T. K. Chien, Semiconductor Manufacturing International Company, Shanghai, China

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