ISTFA Home
Exposition
To Register
ASM Homepage
Back to "Session 27: Sample Preparation 2" Search
Back to "Symposium" Search
Back to Main Search
Thursday, November 18, 2004 - 3:30 PM
27.2
Electrical Characterization of the Access Transistor of Deep Trench based DRAM Products via Backside Contacting
J. Touzel, W. Lehner, S. Pauthner, H. Radeck, U. Weber, Infineon Technologies AG, Munich, Germany
View in WORD format