ISTFA Home
Exposition
To Register
ASM Homepage
Back to "Session 17: SPM Techniques 2" Search
Back to "Symposium" Search
Back to Main Search
Thursday, November 18, 2004 - 8:00 AM
17.1
Doping mapping by SSRM – reaching maturity and sub-10nm resolution
S. Schömann, D. Alvarez, Infineon Technologies AG, Munich, Germany
View in WORD format