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Thursday, November 18, 2004 - 3:05 PM
26.1
Optimizing FIB Depositions and Gas-Assited Etching
C. Rue, FEI Company, Hillsboro, OR; S. Herschbein, C. Scrudato, IBM Systems & Technology, Hopewell Junction, NY; L. Fischer, IBM, Hopewell Junction, NY
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